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KIST 한국과학기술연구원 Korea Institute of Science and Technology

Micro Nano Fab Center

In 1997, KIST built the Clean Laboratory Center, equipped with cleanrooms and state-of-the-art facilities for boosting the development of advanced technologies to lead the 4th Industrial Revolution. We conduct research on MEMS and micro/nanotechnologies and offer researchers easy and convenient use of our facilities.

Equipment at the Micro/Nano Fab Center can be reserved through our website, and, in order to foster quick and effective sharing, researchers may use our processing services in full or just use individual pieces of equipment. We also provide general/customized processing services for KIST, various academic organizations, research institutes, and corporations.

Our center has 500 m2-sized cleanrooms of the 10, 100, and 1,000 classes, for a combined total floor area of 6,600 m2. Over the last 15 years, we gradually built up our infrastructure to the highest level possible when it comes to conducting MEMS/nano research.

We are expanding our user base through annual equipment and safety training, effective facility equipment use, and promotion of proper processing procedures through firsthand training.

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